橢偏儀在位表征電化學(xué)沉積的系統(tǒng)搭建（二十七）- 介電常數(shù)的演變

正文

橢偏儀在位表征電化學(xué)沉積的系統(tǒng)搭建（二十七）- 介電常數(shù)的演變

1陕习、短波范圍(300-500 nm)

圖4-11是經(jīng)過擬合得到的在短波段的n、k及和郑藏。從圖中可以看到不同沉積時間下得到的曲線隨波長的變化大致趨勢一致衡查，但在細(xì)節(jié)方面及數(shù)值上會有變化且和0s有較差別。n必盖、k值的變化前面有敘述拌牲，這里更加明顯的看到了360s時得到的各個值和其他時間的差別俱饿，說明該時間下沉積得到的薄膜比較特殊，如前所述有待進(jìn)一步驗(yàn)證塌忽。從圖4-11(c)圖來看整體上有無沉積對比較明顯拍埠，0s時從正值一致減小到負(fù)值，這同樣反映的是金屬Au的特性土居。其余時間180s的zui大枣购，360s的zui小且在300nm處的值小于0，其它時間值比較接近擦耀。對比0s在320nm附近出現(xiàn)新的波包棉圈。從圖4-11(d)圖來看在0s時數(shù)值都比有沉積的大，且在400-500nm段變化趨勢不同眷蜓，0s為增加趨勢其他時間為減小趨勢分瘾。0s時在370nm附近出現(xiàn)波包，其他沉積時間在310nm和400nm附近出現(xiàn)波包吁系。認(rèn)為310nm附近的波包是新出現(xiàn)的德召，而400nm附近的波包源于0s時的370nm處的波包只是它發(fā)生了紅移。對不同沉積時間相互對比汽纤，180s的變化值比較小上岗，且看起來和其他時間有差異，這可能是由于沉積薄膜厚度引起蕴坪。時間增加到360s以后肴掷，的變化趨勢基本一致，只是360s比其他時間的小辞嗡，且隨著波長的增加其差別也變大捆等。

圖4-11擬合得到的不同沉積時間薄膜的300-500nm波段的(a)n滞造、(b)k及介電常數(shù)(c)實(shí)部和(d)虛部

2续室、長波范圍(500-800nm)

圖4-12是模擬得到的各個沉積時間的介電常數(shù)實(shí)部和虛部相對于1s的變化Δ和Δ以及相對于180s的變化率。圖4-12(a)在300-600nm波段Δ為谒养，600-800nm波段Δ為正值挺狰，整體的變化趨勢。從圖4-12(b)來看Δ除了360s买窟，其余的在470nm-600nm附近是負(fù)值丰泊，其余是正值。360s在300nm-420nm波段為正值始绍，其余波段負(fù)值4-12(c)顯示Δ/的變化規(guī)律和Δ的比較相似瞳购，但是放大了600-800nm波段的變化。從4-12(d)來看Δ/的變化規(guī)律和Δ相似亏推，但是同樣在600-800nm波段其變比Δ的要大学赛。

Δ年堆、Δ在圖中出現(xiàn)的躍遷可能是沉積基底表面的干涉現(xiàn)象的要進(jìn)驗(yàn)另外Δ/和Δ/圖線的長波段的雜亂同樣表明在長波段(500-800nm)該測試系統(tǒng)對薄膜的表征不理想，后續(xù)研究可盡量在小于500nm的波段進(jìn)行盏浇。

圖4-12相對于180s沉積的變化(a)变丧；(b)；(c)/;(d)/

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