橢偏儀在位表征電化學(xué)沉積的系統(tǒng)搭建（二十）- 長(zhǎng)方形流動(dòng)微腔

正文

橢偏儀在位表征電化學(xué)沉積的系統(tǒng)搭建（二十）- 長(zhǎng)方形流動(dòng)微腔

3.3.2長(zhǎng)方形流動(dòng)微腔

為了解決溶液微圓形腔體溶液注入困難、溶液少及反應(yīng)產(chǎn)生氣泡的問(wèn)題飒责，進(jìn)一步對(duì)腔體進(jìn)行改進(jìn)赘娄，得到微流腔體。圖3-18是微流腔體制作過(guò)程示意圖宏蛉，首先準(zhǔn)備好ITO遣臼、EVA膠膜、特氟龍細(xì)管拾并、Au/Si揍堰，把EVA膠膜切成內(nèi)為25px×62.5px，外為37.5px×75px的長(zhǎng)方形嗅义，然后從上到下依次把ITO屏歹、EVA膠膜/特氟龍細(xì)管、Au/Si疊好置于加熱平臺(tái)之碗，在150℃下加熱蝙眶，使得EVA軟化粘合池體，zui后冷卻得到成品褪那。

該池體工作電極即為Au/Si基底幽纷，上端的ITO即為對(duì)電極式塌，溶液的進(jìn)出由兩邊的特氟龍細(xì)管實(shí)現(xiàn)，通常制作完成后的微腔厚度和特氟龍細(xì)管一致友浸，約為1mm峰尝。該微腔具有液層薄、溶化充足且流動(dòng)可以消除ITO上產(chǎn)生的氣泡等優(yōu)點(diǎn)尾菇。

圖31-18流動(dòng)型微腔示意圖

用該池體對(duì)不同濃度醋酸鉛溶液進(jìn)行測(cè)試境析，得到的結(jié)果如圖3-19所示∨晌埽可以看到有無(wú)溶液加入劳淆，測(cè)試得到的橢偏參數(shù)峰位及數(shù)值上都存在差別。但是在加不同濃度的溶液(去離子水默赂、1M醋酸鈉沛鸵、1M的醋酸鈉和5/10/15/20mM的醋酸鉛)后得到的橢偏參數(shù)數(shù)值和趨勢(shì)都一致。這和前面所述的半圓弧型電解池在不同濃度的醋酸鉛溶液中橢偏測(cè)試結(jié)果一致缆八，同樣說(shuō)明在醋酸鉛溶液中曲掰，其濃度橢偏測(cè)試參數(shù)的影響可忽略不計(jì)。

圖3-19不同條件下EVA腔體橢偏測(cè)試結(jié)果(a)Psi奈辰；(b)Delta

如圖3-20所示栏妖，是用該池體進(jìn)行沉積薄膜的結(jié)果。電解液為0.02MCu(CH₃COO)_2奖恰，0.1MCH₃COONa吊趾，Au/Si為工作電極，ITO為對(duì)電極瑟啃，-0.4mA恒壓沉積论泛。對(duì)比沉積前后腔體圖可知，用該池體可以進(jìn)行沉積。與前圓環(huán)電極對(duì)比可以看到，ITO上不再有氣泡存在刚照，因?yàn)楫a(chǎn)生的氣泡都被流動(dòng)的溶液帶走了。因溶液可以流動(dòng)剖笙，故可克服圓環(huán)電極溶液少的缺點(diǎn)。所以后續(xù)沉積薄膜實(shí)驗(yàn)的橢偏儀監(jiān)測(cè)選用該流動(dòng)池體進(jìn)行。

圖3-20流動(dòng)型微腔(a)沉積前(b)沉積后實(shí)物圖

3.4小結(jié)

本文主要介紹了研究中實(shí)驗(yàn)裝置的設(shè)計(jì)及測(cè)試的過(guò)程，主要包含半圓弧型器件微元腔體器件载绿。首先設(shè)計(jì)完成半圓弧器件，實(shí)現(xiàn)了把沉積過(guò)程和橢偏儀測(cè)試相結(jié)合油航，觀察窗口選用石英玻璃，理論上zui大限度減小了光的損耗怀浆。但是它的池體設(shè)計(jì)太大使得溶液浪費(fèi)且測(cè)試過(guò)程中基底的更換谊囚、池體的密封困難怕享。然后完成圓環(huán)型微元腔體的設(shè)計(jì)及制作，其足夠小的腔體減小了溶液對(duì)橢偏測(cè)試帶來(lái)的影響镰踏。但是容納的溶液會(huì)帶來(lái)沉積離子不夠的問(wèn)題且經(jīng)過(guò)實(shí)驗(yàn)發(fā)現(xiàn)對(duì)電極ITO上會(huì)出現(xiàn)氣泡函筋，影響橢偏測(cè)試，所以在此基礎(chǔ)上設(shè)計(jì)制作完成了長(zhǎng)方形微流腔體奠伪。該設(shè)計(jì)成功解決了氣泡和溶液少所帶來(lái)的問(wèn)題跌帐，故而后續(xù)實(shí)驗(yàn)將采用長(zhǎng)方形微流腔體。

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